Status not reported
Surface Technology Systems M/PLEX Multiplex ICP Et...
AllSurplus
- Status
- Status not reported
- Seller / agency
- Lumentum Operations
- Location
- San Jose, California, USA
- Source-reported current bid
- 0 (currency not supplied)
- Condition
- Used
- Source listing ID
- 2598-13572
Source-published description
Surface Technology Systems M/PLEX Multiplex ICP Etcher, 400V, 50Hz, 3ph, w/ MAG900CT turbopump. Includes power distribution & control rack cabinet, w/ power distribution, Electrogrip electrostatic driver, vAT PM-7 adaptive pressure controller, Leybold Mag Drive 1000 pump controller; ENI ACG-10B RF generator; ENI ACG-3B-06 RF generator; ENI VL-400 phase shift controller; PowerBright VC-2000 step-up/down transformer; BOC Edwards iQDP-80 roughing pump, code# A532-80-905; Neslab RTE-211 recirculating chiller, BOM# 135103200702; gas cabinet; LEP300 control server. Configured for 3in substrates. Serial no. 29443. Mfg 2001.
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